Introduction to MEMS and MEMS PRO
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Introduction to MEMS and MEMS PRO simulating tool
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Introduction to MEMS and MEMS PRO
- 1. MEMS & MEMS PRO Presenter: Abdelrahman Samy El-Tamawy
- 2. AGENDA • MEMS Overview • Modeling and Simulating MEMS • Finite Element Method • MEMS PRO Tool
- 3. MEMS OVERVIEW Definition Micro Systems Electro Mechanical
- 4. MEMS OVERVIEW • Size μ
- 5. MEMS OVERVIEW APPLICATIONS • Biotechnology • Vehicles • Smart devices • Printers • Projectors
- 6. MEMS OVERVIEW APPLICATIONS • Vehicles VIDEO
- 7. MEMS OVERVIEW FABRICATION MATERIAL • Silicon • Polymers • Metals • Ceramic
- 8. MEMS OVERVIEW FABRICATION PROCESS • Deposition • Lithography • Etching
- 10. MODELING AND SIMULATING MEMS • Real experiments cost • Physical model • Mathematical models • numerical models • FEM (Finite Element Method) • BEM (Boundary Element Method)
- 11. MODELING AND SIMULATING MEMS FINITE ELEMENT METHOD • Approximate solution • Dividing • Simpler approximation • Global approximate solution • Tools (COMSOL/ANSYS)
- 12. MEMS PRO
- 13. MEMS PRO WHAT IS MEMS PRO • Set of CAD tools • Allow data sharing • Design and Analysis • 3D model generation • Powerful optimization algorithms • For MEMS and IC devices
- 14. MEMS PRO MODELING TOOLS • Behavioral model from FEA • Different formats • 3D Modeling w.r.t Fab sequence • Cross section viewer
- 15. MEMS PRO S-EDIT (SCHEMATIC-EDIT) • Cell view • Symbol Mode • Schematic Mode • Objects • Primitives • Instance
- 16. MEMS PRO S-EDIT
- 17. MEMS PRO S-EDIT • Mechanical elements
- 18. MEMS PRO S-EDIT • Optical elements
- 19. MEMS PRO W-EDIT (WAVE-EDIT) • Functionality • Tracing specific node • Collapsing charts
- 20. MEMS PRO W-EDIT
- 21. MEMS PRO L-EDIT (LAYOUT-EDIT) • Functionality • Library Palette
- 22. MEMS PRO L-EDIT • Library palette
- 23. MEMS PRO L-EDIT • Plate • Comb drive
- 24. MEMS PRO L-EDIT
- 25. MEMS PRO L-EDIT • Technology manager
- 26. MEMS PRO L-EDIT • 2D/3D Model view
- 27. MEMS PRO L-EDIT • 2D/3D Model view
- 28. MEMS PRO L-EDIT • Running simulation
- 29. MEMS PRO DESIGN RULE CHECKER • Layout vs. Fabrication • Flexible DRC
- 30. MEMS PRO DRC • Complete set of DRC
- 31. MEMS PRO DRC • Specific DRC command
- 32. MEMS PRO DRC • Min Distance • Min Overlap • Min spacing • Min surround
- 33. MEMS PRO DRC • Run • Verification Error Navigator
- 34. MEMS PRO DRC • Current distance: 2um. • Rule distance: > 4um.
- 37. MEMS PRO WHAT NEXT? • Analysis (FEM – BEM) • Pre-Fabrication • Fabrication
- 38. MEMS PRO ANSYS
- 39. MEMS PRO END NEXT: ANSYS TOOL WITH IBRAHIM AWAD
Editor's Notes
- A complete unit that contains both electrical and mechanical microstructures Micro - Small size, microfabricated structures • Electro - Electrical signal /control ( In / Out ) • Mechanical - Mechanical functionality (Out/ In ) • Systems - Structures, Devices, Systems controls
- a factor of 10−6
- Deposition: The ability to deposit thin films of material on a substrate.Lithography: the transfer of a pattern into a photosensitive material.A photosensitive material is a material that experiences a change in its physical properties when exposed to a radiation sourceEtching: To etch the films selectively to the mask.There are two basic categories of etching processes: wet etching and dry etching. In the former, the material is dissolved when immersed in a chemical solutionWet etching: The material is dissolved when immersed in a chemical solution.Dry etching: The material is sputtered or dissolved using reactive ions or a vapor phase etchant.
- Therefore, it is very important to have appropriate physical models of the system to be analyzed; then from these physical models, we derive the mathematical models as well as the numerical models of the systemOften, a physical system could include a group of complex governing partial differential equations, which is difficult to be solved analytically. Therefore, we utilize the numerical methods such as FEM (Finite Element Method) and BEM (Boundary Element Method), which are essentially the numerical approaches to solve the Partial Differential Equations (PDE) of the physical system.
- FEM a numerical technique for finding approximate solutions to partial differential equations (PDE) and their systems is a method of dividing a physical system (with PDE characteristics) to be analyzed into smaller pieces (discrete elements). Each of these smaller pieces will have a simpler approximation of the solution. These local approximate solutions will then be put together to obtain a global approximate solution. FEM will include the determination of the discretized elements (cells/ mesh/ grids) as well as the basis function approximated in each cell. In FEM, the physical system (domain) will be thoroughly discretized, which will become one point of its differences with BEM. In elastic analysis, FEM has the root analogous with analytical Rayleigh-Ritz method which is derived from the energy principle.
- FEM a numerical technique for finding approximate solutions to partial differential equations (PDE) and their systems is a method of dividing a physical system (with PDE characteristics) to be analyzed into smaller pieces (discrete elements). Each of these smaller pieces will have a simpler approximation of the solution. These local approximate solutions will then be put together to obtain a global approximate solution. FEM will include the determination of the discretized elements (cells/ mesh/ grids) as well as the basis function approximated in each cell. In FEM, the physical system (domain) will be thoroughly discretized, which will become one point of its differences with BEM. In elastic analysis, FEM has the root analogous with analytical Rayleigh-Ritz method which is derived from the energy principle.
- The SoftMEMS CAD Design Environment Is a customizable set of CAD tools for the development and test of MEMS-based products. SoftMEMS CAD tools are open-platform products that support leading electronic design automation environments used for integrated circuit development. SoftMEMS tools allow data sharing between system designers, IC designers, process engineers and MEMS experts, permitting earlier and consistent design checks between multidisciplinary teams. Our tool suites enable designers to develop new MEMS designs, integrate existing designs (intellectual property) into systems, and couple them with electronics.Simulation modes include AC, DC operating point, DC transfer sweep, Fourier, Noise, Transient, Transfer function, and Parametric Sweep.Powerful optimization algorithms determine device or process parameters that will optimize MEMS design performance.
- a behavioral model reproduces the required behavior of the original analyzed system, such as there is a one-to-one correspondence between the behavior of the original system and the simulated systemgenerates simulation ready descriptions in a variety of popular formats. Surface and bulk micromachining process steps such as material deposit, etch, mechanical polish, diffusion, growth, electroplating and wafer manipulation steps are supported.The Cross Section Viewer displays a cutaway view in the z-dimension based on a user-specified cut line
- The Design Area (in the center) contains the schematicSymbol Mode: a graphical representation of the module showing the cellís connections. Schematic Mode: shows the composition and connectivity of the cell. Primitives: geometrical objects, wires, ports, annotation objects, and labels; all created with theS-Edit drawing tools. Instance: ì copiesî of other cells, dynamically linked to their originals. Instances are displayedin a design using the cellís symbol.
- Mechanical elements
- an optical switch is a switch that enables signals in optical fibers or integrated optical circuits
- Viewing a Waveformthe amplitude information of node right_m, (vm(right_m)), and the other displaying the phase angle, (vp(right_m)), both plotted versus frequency.
- Viewing a Waveformthe amplitude information of node right_m, (vm(right_m)), and the other displaying the phase angle, (vp(right_m)), both plotted versus frequency.
- -A resonator is a device or system that exhibits resonance or resonant behavior-generate the layout of the resonator using the MEMS Library Palette-The MEMS Library Palette contains active elements, passive elements, thermal elements, opticalelements, test elements, resonator elements and fluidic elements. Dynamic library can be loaded in installation phase
- Control the most important phase of fabrication
- Control the most important phase of fabrication
- Control the most important phase of fabrication
- Control the most important phase of fabrication
- The Design Rule Checker (DRC) provides you with a number of features that facilitate thecompatibility checking between layout and fabrication capability. Layout designs have geometricrules or constraints, limited by fabrication capabilities. Therefore, there are sets of design rules,provided by foundaries, that are determined for specific fabrication processes.
- The Design Rule Checker (DRC) provides you with a number of features that facilitate thecompatibility checking between layout and fabrication capability. Layout designs have geometricrules or constraints, limited by fabrication capabilities. Therefore, there are sets of design rules,provided by foundaries, that are determined for specific fabrication processes.
- The Design Rule Checker (DRC) provides you with a number of features that facilitate thecompatibility checking between layout and fabrication capability. Layout designs have geometricrules or constraints, limited by fabrication capabilities. Therefore, there are sets of design rules,provided by foundaries, that are determined for specific fabrication processes.
- The Design Rule Checker (DRC) provides you with a number of features that facilitate thecompatibility checking between layout and fabrication capability. Layout designs have geometricrules or constraints, limited by fabrication capabilities. Therefore, there are sets of design rules,provided by foundaries, that are determined for specific fabrication processes.
- Select the Glue option to glue adjacent volumes, so that they will be correctly meshed.