20091029%20 l edit%20by%20cwchang%20(for%20std)

•

1 like•396 views

ashishkkr

Technology Education

National Chiao Tung University, Department of Electrical & Control Engineering
μSystem & Control Laboratory

L-Edit Tutorial

cwchang
Advisor: professor J.C. Chiou
μSystem & Control Lab., Dept. of Electrical & Control Eng.,
National Chiao Tung University
2009/10/29

L-Edit Operation Screen

Editing Standard

Drawing
Locator

Layers palette
Layout area

Mouse buttons
Status Bar

Process Definition File for Mumps

gd: grow deposition, e : etching

Mask Definition

Finished Product

layout

Clear Dark Mask define

Operation

1.2 button mouse and 3 button mouse.(Ctrl)
2.keyboard
1. Original point transfer (Q)
2. zoom window(z)
3. zoom in (+)
4. zoom out (-)
5. move view (←↑→↓)
6. exchange view (x)
3.Copy cell in different file (the same setup)
4.Copy cell in different file (different setup)
5.Array & rotation

Example: MUMPS

• Multi-User MEMS Process=MUMPS
• 3-layer PolySilicon surface micromachining process

Source: MUMPS Design Handbook

Example: MUMPS

Anchor 1
Anchor 2

Poly 1, Poly 2 via
Source: MUMPS Design Handbook

Example: CMOS-MEMS

• TSMC .35um CMOS process

Example: CMOS-MEMS

• Post-micromachining process

Source: tsmc CMOS-MEMS process Source: C.Wang, JMEMS(2007)

Case Study (I)-Slider
A

B’
B

A’

Movable part = poly1 A-A’
Anchor = poly2

B-B’

Case Study (II)-Hinge (on the substrate)

Reference

• L-Edit student version & L-Edit manual:
http://www.tanner.com.tw/EDA/products/ledit/default.htm
• Poly-Mumps:
http://www.memscap.com/en_mumps.html
• Mumps handbook:
http://www2.ece.jhu.edu/faculty/andreou/487/Resources/Foundry/PolyMUMPS/PolyMU
MPs_DR_v10.pdf
• CIC 國家晶片系統設計中心 CMOS-MEMS platform
• www.google.com

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20091029%20 l edit%20by%20cwchang%20(for%20std)

1. National Chiao Tung University, Department of Electrical & Control Engineering μSystem & Control Laboratory L-Edit Tutorial cwchang Advisor: professor J.C. Chiou μSystem & Control Lab., Dept. of Electrical & Control Eng., National Chiao Tung University 2009/10/29

2. L-Edit Operation Screen Editing Standard Drawing Locator Layers palette Layout area Mouse buttons Status Bar

10.

11.

12.

13.

14.

15.

16.

17.

18.

19.

20. Generate Cross-Section Dialog

21. Process Definition File for Mumps gd: grow deposition, e : etching

22. Mask Definition Finished Product layout Clear Dark Mask define

23. Operation 1.2 button mouse and 3 button mouse.(Ctrl) 2.keyboard 1. Original point transfer (Q) 2. zoom window(z) 3. zoom in (+) 4. zoom out (-) 5. move view (←↑→↓) 6. exchange view (x) 3.Copy cell in different file (the same setup) 4.Copy cell in different file (different setup) 5.Array & rotation

24. Example: MUMPS • Multi-User MEMS Process=MUMPS • 3-layer PolySilicon surface micromachining process Source: MUMPS Design Handbook

25. Example: MUMPS Anchor 1 Anchor 2 Poly 1, Poly 2 via Source: MUMPS Design Handbook

26. Example: CMOS-MEMS • TSMC .35um CMOS process

27. http://www.memscap.com/en_mumps.html

28. Example: CMOS-MEMS • Post-micromachining process Source: tsmc CMOS-MEMS process Source: C.Wang, JMEMS(2007)

29. Source: CIC

30. Case Study (I)-Slider A B’ B A’ Movable part = poly1 A-A’ Anchor = poly2 B-B’

31. Case Study (II)-Hinge (on the substrate)

32. Case Study (III)-Hinge (on the poly1)

33. C A A’ B B’ C’ A-A’ B-B’ C-C’

34. Case Study (IV)-Micro Motor Dimple

35.

36. Reference • L-Edit student version & L-Edit manual: http://www.tanner.com.tw/EDA/products/ledit/default.htm • Poly-Mumps: http://www.memscap.com/en_mumps.html • Mumps handbook: http://www2.ece.jhu.edu/faculty/andreou/487/Resources/Foundry/PolyMUMPS/PolyMU MPs_DR_v10.pdf • CIC 國家晶片系統設計中心 CMOS-MEMS platform • www.google.com

20091029%20 l edit%20by%20cwchang%20(for%20std)

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