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T. Kasahara1, J. Mizuno1, S. Hirata2, T. Edura2, S. Matsunami2, C. Adachi2, and S. Shoji1 1Waseda
                                  University, Tokyo, JAPAN 2Kyushu University, Fukuoka, JAPAN

                                      MEMS 2012, Paris, FRANCE, 29 January - 2 February 2012




                                                                  Reporter-Vivek Hegde
   OLED Technology
   Motivation
   Concept and Principle
   Experimental Procedure
    Design of Prototype micro-fluidic OLED
    Fabrication Process
    Evaluation of Fabricated micro-fluidic OLED
   Result and Discussion
   Conclusion
   Micro fluidic devices have been developed for a
    wide range of applications.

   OLEDs containing of solid-state organic
    semiconductors.

   Next generation flat panel display due to their
    wide viewing angle, light weight and thin
    components.

    Recently the optoelectronics devices based on
    the liquid emitting materials such as electro-
    chemiluminescence (ECL) OLEDs are also
    reported.
   The micro-channel structures are usually fabricated using
    MEMS technology.

   Negative photo-resist SU-8 has been suitable material for the
    micro channel fabrication .

    Transparent electrodes such as indium tin oxide (ITO)
    facilitate the optical microscopic observation of fluidic
    behaviour in the micro channels.

   ITO has been widely used as an anode in OLEDs due to its
    high electrical conductivity.

   Here Combination of micro-fluidics and liquid OLED.
    Different fresh liquid
    organic semiconductors are
    continuously injected from
    the inlets to the light
    emitting areas using the
    syringe pumps.
   Micro-fluidic OLED, which consists
    of micro-channels and pairs of ITO
    anode and cathode.

    Electroluminescence is
    performed in the flowed liquid
    organic semiconductors by the
    radiative recombination of
    electron-hole pairs with DC
    voltage.
   The microchip has a 3 3 matrix of
    OLED array in the SU-8 micro-
    channels.

   The micro-channels are sandwiched
    between the ITO anodes on a glass
    substrate and the polyethylene
    naphthalate (PEN) film with the ITO
    cathodes.

   Depth is chosen about 6 µm for
    enhancement of OLED performances,
    widths are 1000, 1250, and 1500 µm.
   ITO-anode patterned by conventional
    photolithography and wet etching using
    dilute aquarigia(a).(HCl-HNO3-H2O)

   SU-8 3005 6 µm thick obtained by spun on
    substrate at 4000 rpm for 20 Sec and soft
    baked at 95ºC for 10 min(b).

   For the surface modification of the SU-8
    layer, the ITO anodes in the micro
    channels were covered by sacrificial layer
    of positive resist of 350 nm(c).
   The ITO cathodes were fabricated by the
    same process as the ITO anodes.

   The inlet and outlet of the microchannels
    were mechanically punched for injecting.

   The anode and cathode substrates were
    separately fabricated and were bonded to
    form enclosed ITO electrodes embedded
    micro-fluidic channels.
To incorporate oxygen
          functionalities in to
          SU8,PEN and ITO

       Finally, the surfaces were
       bonded under contact
       pressure of 1.5 MPa at 140
        C for 5 min to form bond


Immersed in
GOPTS-Glycidodyloxy proplyl tri
methoxysilane
APTES- Amino propyl triethoxysilane

The anode substrate was then rinsed
with acetone and IPA to remove the
sacrificial resist and any unbound
GOPTS-SAM, while the cathode
substrate was rinsed with ethanol .

     The inlet and OLED were were
     Fabricated outlet nozzles investigated
     connected to the top plate. The liquid
     emitters introduced manuallymicroscope
     using scanning acoustic while the
     (SAM) at 175 MHz
     used liquid emitters were collected from
     the outlet nozzles.
TheTwo types liquid emitter was detected by:
  flow of the of tests were performed
365the observation of theProper DC voltages
     nm UV light irradiation. fluidic
were applied to the device with a source meter,of
    behaviour and electroluminescence
and the electroluminescence was recorded with a
    the liquid emitter in the micro-
digital camera. The J-V characteristics were
measured usingand the currentparameter
    channels, a semiconductor density-
    voltage (J-V) measurement.
analyzer
SAM image of the fabricated microfluidic OLED        Demonstration




 Electroluminescence in the microchannels of (b) 1000, (c) 1250 and (d) 1500 µm width
 under applied 70 V.
The current density increased
                                       with increasing applied voltage




                                       The intensity increased
                                       significantly larger than 30 V




J-V Characteristics of micro-fluidic OLED
   Research proposed a combination of micro-fluidic and liquid
    OLED, and fabricated a first prototype micro-fluidic OLED.

   Optimized fabrication method was developed.

   The electroluminescence was obtained in the flowed liquid
    emitters under the appropriate applied voltage.

   The current density of 2.11 mA/cm2 was measured when 60 V
    was applied .

   In contrast thicker emitter layer, higher driving voltage than
    solid state OLED.
Thank you
https://www.youtube.com/watch?v=9OvTLg4i2_U&playnext=1&list=PL
7C0E1F21B3FB709C&feature=results_main

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Microfluidic oled vivek hegde

  • 1. T. Kasahara1, J. Mizuno1, S. Hirata2, T. Edura2, S. Matsunami2, C. Adachi2, and S. Shoji1 1Waseda University, Tokyo, JAPAN 2Kyushu University, Fukuoka, JAPAN MEMS 2012, Paris, FRANCE, 29 January - 2 February 2012 Reporter-Vivek Hegde
  • 2. OLED Technology  Motivation  Concept and Principle  Experimental Procedure Design of Prototype micro-fluidic OLED Fabrication Process Evaluation of Fabricated micro-fluidic OLED  Result and Discussion  Conclusion
  • 3. Micro fluidic devices have been developed for a wide range of applications.  OLEDs containing of solid-state organic semiconductors.  Next generation flat panel display due to their wide viewing angle, light weight and thin components.  Recently the optoelectronics devices based on the liquid emitting materials such as electro- chemiluminescence (ECL) OLEDs are also reported.
  • 4. The micro-channel structures are usually fabricated using MEMS technology.  Negative photo-resist SU-8 has been suitable material for the micro channel fabrication .  Transparent electrodes such as indium tin oxide (ITO) facilitate the optical microscopic observation of fluidic behaviour in the micro channels.  ITO has been widely used as an anode in OLEDs due to its high electrical conductivity.  Here Combination of micro-fluidics and liquid OLED.
  • 5. Different fresh liquid organic semiconductors are continuously injected from the inlets to the light emitting areas using the syringe pumps.
  • 6. Micro-fluidic OLED, which consists of micro-channels and pairs of ITO anode and cathode.  Electroluminescence is performed in the flowed liquid organic semiconductors by the radiative recombination of electron-hole pairs with DC voltage.
  • 7. The microchip has a 3 3 matrix of OLED array in the SU-8 micro- channels.  The micro-channels are sandwiched between the ITO anodes on a glass substrate and the polyethylene naphthalate (PEN) film with the ITO cathodes.  Depth is chosen about 6 µm for enhancement of OLED performances, widths are 1000, 1250, and 1500 µm.
  • 8. ITO-anode patterned by conventional photolithography and wet etching using dilute aquarigia(a).(HCl-HNO3-H2O)  SU-8 3005 6 µm thick obtained by spun on substrate at 4000 rpm for 20 Sec and soft baked at 95ºC for 10 min(b).  For the surface modification of the SU-8 layer, the ITO anodes in the micro channels were covered by sacrificial layer of positive resist of 350 nm(c).
  • 9. The ITO cathodes were fabricated by the same process as the ITO anodes.  The inlet and outlet of the microchannels were mechanically punched for injecting.  The anode and cathode substrates were separately fabricated and were bonded to form enclosed ITO electrodes embedded micro-fluidic channels.
  • 10. To incorporate oxygen functionalities in to SU8,PEN and ITO Finally, the surfaces were bonded under contact pressure of 1.5 MPa at 140 C for 5 min to form bond Immersed in GOPTS-Glycidodyloxy proplyl tri methoxysilane APTES- Amino propyl triethoxysilane The anode substrate was then rinsed with acetone and IPA to remove the sacrificial resist and any unbound GOPTS-SAM, while the cathode substrate was rinsed with ethanol .
  • 11. The inlet and OLED were were Fabricated outlet nozzles investigated connected to the top plate. The liquid emitters introduced manuallymicroscope using scanning acoustic while the (SAM) at 175 MHz used liquid emitters were collected from the outlet nozzles. TheTwo types liquid emitter was detected by:  flow of the of tests were performed 365the observation of theProper DC voltages nm UV light irradiation. fluidic were applied to the device with a source meter,of behaviour and electroluminescence and the electroluminescence was recorded with a the liquid emitter in the micro- digital camera. The J-V characteristics were measured usingand the currentparameter channels, a semiconductor density- voltage (J-V) measurement. analyzer
  • 12. SAM image of the fabricated microfluidic OLED Demonstration Electroluminescence in the microchannels of (b) 1000, (c) 1250 and (d) 1500 µm width under applied 70 V.
  • 13. The current density increased with increasing applied voltage The intensity increased significantly larger than 30 V J-V Characteristics of micro-fluidic OLED
  • 14. Research proposed a combination of micro-fluidic and liquid OLED, and fabricated a first prototype micro-fluidic OLED.  Optimized fabrication method was developed.  The electroluminescence was obtained in the flowed liquid emitters under the appropriate applied voltage.  The current density of 2.11 mA/cm2 was measured when 60 V was applied .  In contrast thicker emitter layer, higher driving voltage than solid state OLED.